10SCCM-5SLM2%~100%of Full Scale<±1.0%of Full Scale <±0.5% of Full Scale <±0.2% of Full Scale <2 sec 0~50°C(Accuracy Guaranteed:15~35°C) 0~10 Bar(g) 1x10-9 atm. cc/sec He + 15Vdc or 24Vdc/300mA 0-5V Viton/Buna/Kal rez/Teflon/Epdm Normally Closed Solenoid D-Sub 9 Pin Connector Male 1/4" , l/8n, LOK Analog Type SUS 316L 15 min (Accuracy Guaranteed:30 min )