10SCCM-30SLM2%~100%of Full Scale<±1.0%of Full Scale(20 , 30SLM:<±1.5 Full Scale) <±0.5% of Full Scale <±0.2% of Full Scale <2 sec 0~50°C(Accuracy Guaranteed:15~35°C) 0-100 Bar(g) 1x10-9 atm. cc/sec He + 15Vdc or 24Vdc/300mA 0-5V or4-20mA Viton/Buna/Ka 1 rez/T eflon/Epd m Normally Closed Solenoid D-Sub 9 Pin Connector Male 1/4" , 1/8" , 3/8nl/2"LOK l/4"l/2nVCR Analog Type SUS 316L 15 min(Accuracy Guaranteed:30 min)